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High Purity Silane Production Technology


Technology Overview:
High purity silane (SiH4) is a raw material for semiconductor, Information Technology, and new energy industries. Its applications can be found in LCD, semiconductor, PV and other industries. It can reach extremely high purity and is non-corrosive to equipment and becomes an important specialty gas, which is not replaceable by other silicon containing gases.
Our technology utilizes chlorosilance disproportionation method (also known as UCC method) to produce high purity silane. Our process is a close-loop system with less waste produced. A variety of high purity products can be produced by implanting our process.
 


Brief Introduction of Process Flow:

Crude TCS from customer  and TCS Redistribution Reactor enter TCS Column. The product at the bottom of the column is STC which will be recyled back to STC Storage Tanks and the overhead products are TCS and DCS which flow through reflux pump to DCS Column.
The main purpose of DCS Column is separating TCS from DCS. Two streams make up the feed for the Column. The first feed stream is from  TCS Column and the second stream is from the bottom of Silane Column.The stream at the top of  DCS Column is DCS  and the bottom one is TCS.
Stream from the top of DCS column is sent to DCS Redistribution Reactor by reflux pump, producing some silane and TCS, and all of the reactants enter the Silane Column for separation. Stream from  the bottom of DCS Column is pumped to TCS Redistribution Reactor, producing DCS and STC which will be pumped to TCS Column for distillation separation.
Reactants from DCS Redistribution Reactor enter the Silane Column to separate silane and chlorosilanes. Silane at the top of the column enters into the Column to produce ultra-high purity silane which will be condensed into liquid silane by liquid nitrogen and be stored in the Silane Tanks.


Reaction Equation:

SIHCL3  →  SIH2CL2+SICL4         SIH2CL2 → SIHCL3+SiH4


Advantages and Features:
--The disproportionation reactions are carried out in packed bed reactors providing high efficiency, low energy consumption and low operating costs.
--The entire system is a closed loop generating less waste for high material utilization and is environmentally friendly.
--Silane is easily separated from reactants and impurities to provide high purity (6N).
--Chlorosilanes from the distillation train is recycled to the disproportionation reactors for re-utilization to minimize waste production.
--Reaction are performed under mild operating conditions for safer and easier control.
--Our process can produce multiple silicon containing materials, such as silane, STC, DCS, etc. with adjustable ratios. 9-11N pure polysilicon can be produced by 6N silane pyrolysis obtained from our process.